Smart inductive measurement sensor
ZX-E offers the best solution for the accurate measurementof metallic objects. It is
highly recommended in harsh environments such as automotive and metal working machines.
• High resolution of 1 μm
• High-speed response time of 150 μs
• Easy sensor headreplacement
• Modular platform concept for different sensing technologies
• Easy linearity adjustmentfor any metal
Shape DimensionsSensing distance Resolution*1
Cylindrical3 dia. × 18 mm 0.5 mm1m ZX-EDR5T
5.4 dia. × 18 mm1 mm ZX-ED01T*2
8 dia. × 22 mm 2 mm ZX-ED02T*2
Screw-shapedM10×22 mm2 mm ZX-EM02T*2
M18×46.3 mm 7 mm ZX-EM07MT*2
Flat30×14×4.8 mm4 mm ZX-EV04T*2,*3
Heat-resistant, cylindricalM12×22 mm2 mm ZX-EM02HT*4
*1For an average count of 4,096.
*2Models with protective spiral tubes are also available. Add a suffix of “-S” to the above model numbers when ordering. (Example: ZX-ED01T-S)
*3Be sure to use ZX-EDA amplifier unit version 1,200 or later with the ZX-EV04.
*4Be sure to use ZX-EDA amplifier unit version 1,300 or later with the ZX-EM02H.
Power supplyOutput typeOrder code
Note:Compatible connection with the sensor head.
Accessories (order separately)
SmartMonitor sensor setup tool for Personal Computer connection
ZX-series communications interface unitZX-SF11
Amplifier mounting brackets
ZX-series communications interface unit
+ setup software (CD-ROM)
Attached to each sensor head ZX-XBE1
For DIN trackmountingZX-XBE2
ZX-series sensor setup and loggingsoftware(CD-ROM) ZX-SW11EV3
*1The ZX-SFW11EV3 SmartMonitor can be used only to set functions and monitor wave- forms.
Cables with connectors on both ends (for extension)*
*Robot cable models are also available. The model numbers are ZX-XC_R.
ItemZX-EDR5T ZX-ED01TZX-ED02T/EM02TZX-EM07MTZX-EV04TZX-EM02HT Measurement range0 to 0.5 mm0 to 1 mm 0 to 2 mm 0 to 7 mm 0 to 4 mm 0 to 2 mm Sensing objectMagnetic metals
(Measurement ranges and linearities are different for non-magnetic metals. Refer to engineering data on B-67.)
Standard reference object18 × 18 × 3 mm30 × 30 × 3 mm60 × 60 × 3 mm45 × 45 × 3 mm
Material: Ferrous (S50C)
Linearity*2 0.5% F.S. 1% F.S.*3
Linear output rangeSame as measurement range.
(including amplifier unit)
0.15% F.S./C 0.07% F.S./C 0.1% F.S./C
Operating*5 0 to 50C (with no icing –10 to 60°C (with no icing or condensation)–10 to 200°C
–20 to 70°C (with no icing or condensation)–20 to 200°C
ZX-E Inductivedisplacement sensor
ItemZX-EDR5T ZX-ED01TZX-ED02T/EM02TZX-EM07MTZX-EV04TZX-EM02HT Ambient humidityOperating and storage: 35% to 85% (with no condensation)
Insulation resistance 50 M min. (at 500 DC)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min between charged parts and case
Vibration resistance (destruction)10 to 55 Hz with 1.5-mm double amplitude for 2 h each in X, Y, and Z directions
Shock resistance (destruction)500 m/s2, 3 times each in X, Y, and Z directions
Degree of protection (sensor head)IEC60529, IP65 IEC60529, IP67 IEC60529, IP60*6
Connection methodConnector relay (standard cable length: 2 m)
Weight (packed state) Approx. 120 g Approx. 140 g Approx. 160 g Approx. 130 g Approx. 160 g
Materials Sensor head Case BrassStainless steelBrassZinc (nickel-plated) Brass
AccessoriesAmplifier mounting brackets (ZX-XBE1), instruction manual
*1Accuracy: The resolutionis the deviation (3) in the linear output when connected to the ZX-EDA amplifier unit. The above values indicate the deviations observed 30 minutes after the power is turned ON.
(The resolution is measured with Omron's standard reference object at ½ of the measurement range with the ZX-EDA set for the maximum average count of 4,096 per period.)
The resolution is given at the repeat accuracy for a stationary workpiece, and is not an indication of the distance accuracy. The resolution may be adversely affected under strong electromag- netic fields.
*2Linearity: The linearity is given as the error in an ideal straight line displacement output when measuring the standard reference object. The linearity and measurement values vary with the object being measured.
*3The value given is for an ambient temperature of 25°C.
*4Temperature characteristic: The temperature characteristic is measured with Omron's standard reference object at ½ of the measurement range.
*5The ambient temperature given is only for the sensor head. It is -10 to 60°C for the preamp.
*6Do not use in moist environments because the case is not waterproof.
Measurement period150 μs
Possible average count settings*1
(3 outputs: HIGH/PASS/LOW)
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Current output: 4 to 20 mA/F.S., max. load resistance: 300
Voltage output: ±4 V (±5 V, 1 to 5 V *3), output impedance: 100
NPN open-collector outputs, 30 VDC, 50 mA max. Residual voltage: 1.2 V max.
PNP open-collector outputs, 30 VDC, 50 mA max. Residual voltage: 2 V max.
Zero reset input, timing input, reset input,ON:Short-circuited with 0-V terminal or 1.5 V or less
ON:Supply voltage short-circuited or supply voltage within 1.5 V
judgement output hold input
OFF:Open (leakage current: 0.1 mA max.)
OFF:Open (leakage current: 0.1 mA max.)
Function – Measurement value display – set value/output value/
– Linearity adjustment (materials selection)resolution display – Scaling
– Display reverse– displayOFF mode – ECO mode
– Number of display digit changes– sample hold – peak hold
– Bottom hold, peak-to-peak hold – self-peak hold– self-bottom hold
– Average hold – delay hold– zero reset
– Initial reset – linearity initialization– ON-delay timer
– OFF-delay timer – one-shot timer– previous value comparison
– Non-measurement setting – direct threshold value setting – position teaching
– Automatic teaching – hysteresis width setting– timing inputs
– Reset input – judgement output hold input – monitor focus
– Linear output correction– (A-B) calculations*4 – (A+B) calculations*4
– K-(A+B) calculation*4– mutual interference prevention*4
– Sensor disconnection detection – zero reset memory – zero reset indicator
– Key lock
IndicationsJudgement indicators: High (orange), pass (green), low (yellow), 7-segment main digital display (red),
7-segment sub-digital display (yellow), power ON (green),zero reset (green), enable (green)
0.5% F.S. of linearoutput value at 20% of power supply voltage
Power supply voltage 12 to 24 VDC10%, ripple (p-p): 10% max.
Current consumption140 mA max. with power supply voltage of 24 VDC (with sensor connected)
Ambient temperatureOperating and storage: 0to 50C (with no icing or condensation) Ambient humidityOperating and storage: 35% to 85% (with no condensation) Insulation resistance 20 M min. (at 500 DC)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min
Vibration resistance (destruction)10 to 150 Hz with 0.7-mm double amplitude for 80 min each in X, Y, and Z directions Shock resistance (destruction)300 m/s2, 3 times each in 6 directions (up, down, left, right, forward, backward) Connection methodPrewired (standard cable length: 2 m)
Weight (packed state) Approx. 350 g
MaterialsCase: PBT (polybutylene terephthalate), cover: Polycarbonate
*1The response speed of the linear output is calculated as the measurement period x (average count setting + 1) (with fixed sensitivity).
The response speed of the judgement outputs is calculated as the measurement period x (average count setting + 1) (with fixed sensitivity).
*2The output can be switched between a current output and voltage output using a switch on the bottom of the amplifier unit.
*3Setting is possible via the monitor focus function.
*4A calculating unit (ZX-CAL or ZX-CAL2) is required.